FT-NMT03 in-situ SEMFIB nanomechanical performance testing system

FT-NMT03 in-situ SEMFIB nanomechanical performance testing system
The FT-NMT03 Nanomechanical Performance Testing System is a nanorobot system that can measure the mechanical properties of micro nano materials and structures in situ, directly, and accurately in SEM/FIB. It integrates nano manipulation and mechanical electrical performance synchronous testing functions, which can almost meet all nanomechanical testing needs.

Main applications
(1) In situ mechanical properties testing and structural observation of complex micro nano materials, such as microstructure metamaterials printed by 3D laser;
(2) Multi degree of freedom operation and precision assembly of micro and nano components, such as the splicing and manufacturing of micro and nano components;
(3) Force/electrical analysis of micro nano robots and micro nano sensors, such as performance analysis of micro nano piezoelectric sensors.
Technical advantages
Five axis (X, Y, Z, rotation, tilt) closed-loop control ensures precise alignment of the sample and micro force sensing probe;
Can achieve synchronous testing of mechanical and electrical performance;
Compact exterior design suitable for various full-size SEM/FIB sample rooms;
Can be equipped with different mechanical sensors, with a mechanical measurement range from 0.5nN to 200mN,;
Can achieve optimal working distance observation (<5mm) in SEM;
Large range displacement detection range (0.05nm to 21mm);
Large displacement range (21mm x 12mm x 12mm);
Can be used in conjunction with other SEM analysis detectors, such as EBSD and STEM detectors;
The unique micro clamp technology can achieve the integration of micro nano operation assembly and micro nano mechanical testing.

application area
Micro column/nano compression test:
In order to develop and optimize new high-performance materials, in-situ SEM micro column compression is a valuable tool as it can achieve visualization of columns during load applications.
Nanofiber tensile test:
FT-NMT03 is designed for tensile testing of microfibers and nanofibers. Typical in-situ SEM measurements include creep testing, cyclic testing, and stiffness testing. In addition, the adhesion of fibers in composite materials is often characterized.
Testing of capsules, granules, or cantilevers:
For the system development of new materials and understanding of physical processes, SITU SEM compression tests were conducted on samples such as local, microcapsule, or cantilever beams. Nanomechanical testing can be combined and synchronized with special SEM detectors, for example. EBSD.
Mechanical and Electrical MEMS/NEMS Testing:
The mechanical parameters of MEMS/NEMS that are frequently tested include stiffness, Young's modulus, linearity, adhesion, hysteresis, deflection, actuator force, yield strength, creep, and topography.
Microprocessing and Microassembly:

Microprocessing can be frequently used for sample preparation in scanning electron microscopy.