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  • FusionScope multifunctional microscope

FusionScope multifunctional microscope

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  • FusionScope multifunctional microscope
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FusionScope multifunctional microscope

In most cases, sample analysis typically employs multiple techniques to confirm the correlation between different parameters. For AFM and SEM imaging techniques, this means that in practical operation, it is necessary to compare and analyze completely identical areas. In October 2022, Quantum Design in the United States launched the FusionScope multifunctional microscope, which integrates SEM and AFM technologies into one device. Users do not need to move the sample from one microscope to another, nor do they need to use two different operating systems to analyze the same position on the sample. Instead, complementary comprehensive measurements are conducted within the same user interface and at the same position.

The FusionScope multifunctional microscope provides all the advantages of an atomic force microscope with SEM functionality. It can achieve standard AFM measurement modes, including contact, dynamic, and FIRE modes (Fine Impulse Response Excitation). Simply click the button to switch between AFM and SEM imaging modes at sub nanometer resolution and obtain the required data. By replacing the cantilever, AFM can easily achieve advanced working modes, such as force curves, conductive atomic force microscopy (C-AFM), and magnetic force microscopy (MFM).
FusionScope also provides an EDS spectrometer option, which allows for elemental and chemical analysis of samples in scanning electron microscopy, and collects more accurate data at the nano and micro scales. Combining existing AFM/SEM to make measurement more multifunctional.
Characteristics of FusionScope multifunctional microscope
Simple and easy-to-use

The hardware and software of FusionScope have been carefully designed, which not only makes it easy for beginners to get started quickly and use, but also allows for customized user interfaces, providing all the functions that users need.

Replace the sample

FusionScope sample replacement only takes a few minutes, simple and fast.
Co coordinate system
Using SEM for real-time, fast, and accurate navigation of AFM needles, thereby achieving precise positioning and measurement of areas of interest by AFM. No need to transfer the sample, perform 80 ° AFM in situ and rotate the sample stage simultaneously.
Real time profiling accurately displays the relative positions of AFM probes and samples
One of the special functions of FusionScope is profile imaging, which allows real-time observation of the tip of the AFM cantilever during measurement. Through this profiling method, even difficult to reach sample areas can be approached very accurately with AFM probes, allowing for the measurement of complex shaped samples.
Self sensing cantilever
The AFM in FusionScope adopts self sensing cantilever, which can provide all cantilever electrical signals without optical alignment, achieving high-quality and low-noise measurement of the sample surface. Excellent performance, simple and easy to use. The self sensing probe can allow the electron beam to enter the cantilever and sample areas to a maximum extent, achieving seamless integration of AFM and SEM.
The self sensing cantilever function is also very rich, which can provide more measurement functions, such as conductivity, magnetism, surface potential, temperature, and other sample characteristics. The self sensing cantilever is prepared using focused electron beam induced deposition (FEBID) technology, with a tip radius of less than 10 nm, ensuring high-resolution conductivity or magnetic imaging and excellent mechanical stability.

Task Panel
The FusionScope task menu helps users quickly identify and execute the required microscope operations, and provides a simple and easy-to-use wizard style operation process, helping users reduce the time spent adjusting and managing hardware, and allocate more time to collecting sample images and data analysis.
User interface customization
FusionScope provides a user-friendly software interface to meet the needs of users or experiments. The software is divided into standard mode and advanced mode, and users can customize it according to specific needs. The software supports logging functionality and user comments.
data processing
Each experiment can automatically store the data in an "experiment" file, ensuring convenient data transfer and offline processing between different computers. In the data processing module, third-party data processing software (such as Gwyddion software for AFM data processing) is integrated.

Advantages of FusionScope multifunctional microscope
★ Quantum Design's independently developed AFM and SEM mature integration solution has a high degree of automation, and the software/hardware operation is simple and easy to use;
★ Multiple AFM functions combined with SEM in situ, greatly leveraging the technical advantages of two commonly used microscopes, achieving in situ shared coordinate measurement at the same time, in the same sample area, and under the same conditions, avoiding the risk of contamination during sample transfer, especially suitable for environmentally sensitive samples;
★ Multi channel sample characteristic imaging and seamless correlation to three-dimensional morphology images. The measurable functions of AFM include: 3D/2D surface morphology imaging, mechanical/mechanical performance measurement, electrical measurement, and magnetic measurement; SEM equipped with EDS function;

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